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Physical optics modeling of interferometer-based metrology systems

JUN
25
2019
25. JUN 2019

Lecture Hall ICM - Internationales Congress Center München SPIE Optical Metrology > Modeling Aspects in Optical Metrology VII > Interferometry II

16:30-16:50 h | ICM - Internationales Congress Center München ICM Room 12b

Subjects: Optical Measurement Systems / Optical Metrology

Chairman: Bernd Bodermann (, Physikalisch-Technische Bundesanstalt)

Type: Lecture

Speech: English

Interferometer-based optical setups play an important role in modern optical metrology for different applications. Such setups often consist of multi-disciplinary components. This reveals new ways of improving the performance or enriching the functionality of the system, while at the same time leading to complexities and difficulties in system modeling and analysis. To overcome this, we present a physical-optics-based simulation approach. It is founded on a fully electromagnetic representation of light, and therefore includes the coherence and polarization effects which are of growing interest for modern interferometers. As examples, several typical optical interferometer setups are built up and analyzed. With the physical-optics modeling technique, we demonstrate and understand the functionalities of such setups, so as to help in the design of advanced optical interferometers.

Informations

Location

Eingang
Nord-West
ICM
Eingang
Nord
Eingang
West
Atrium
Eingang
Nord-Ost
Eingang
Ost
Conference
Center Nord
Freigelände
C1
C2
C3
C4
C5
C6
B0
B1
B2
B3
B4
B5
B6
A1
A2
A3
A4
A5
A6

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