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Generation of 10W, 1ns Deep Ultraviolet Pulse at 193nm

JUN
23
2019
23. JUN 2019

Lecture Hall ICM - Internationales Congress Center München CLEO®/Europe-EQEC > Solid-state Lasers > Visible and UV lasers

18:45-19:00 h | ICM - Internationales Congress Center München ICM Room 13a

Subjects: Lasers and Laser Sources

Speaker: Hironori Igarashi (Gigaphoton Inc.)

Chairman: Xavier Mateos (, Universitat Rovira i Virgili)

Type: Lecture

Speech: English

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We demonstrate the generation of 10W, 1ns optical pulse at 193nm for precise micromachining application. Seed pulse is generated by the cascaded sum frequency generation using CLBO crystals and is amplified by ArF excimer amplifier.

Speaker,
Gigaphoton Inc.

Hironori Igarashi

Hironori Igarashi

Gigaphoton Inc.

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Informations

Speaker,
Gigaphoton Inc.

Hironori Igarashi
Hironori Igarashi

Location

Eingang
Nord-West
ICM
Eingang
Nord
Eingang
West
Atrium
Eingang
Nord-Ost
Eingang
Ost
Conference
Center Nord
Freigelände
C1
C2
C3
C4
C5
C6
B0
B1
B2
B3
B4
B5
B6
A1
A2
A3
A4
A5
A6

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