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Suspended Tantalum Pentoxide Rib Waveguides for Laser Absorption Spectroscopy

JUN
23
2019
23. JUN 2019

Lecture Hall A1 CLEO®/Europe-EQEC > Optical Sensing and Microscopy > Integrated sensors I

19:15-19:30 h | Hall A1 Room 1 "Albert Einstein"

Subjects: Sensors, Test and Measurement

Speaker: Marek Vlk (Department of Physics and Technology, UiT The Arctic University of Norway)

Chairman: Andrea Armani (, University of Southern California)

Type: Lecture

Speech: English

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We demonstrate successful fabrication of air-suspended tantalum pentoxide rib waveguides for gas sensing. The fine, high-aspect-ratio membrane structures were realized via selective removal of Si substrate using XeF2 etching and Al2O3 passivation.

Marek Vlk

Department of Physics and Technology, UiT The Arctic University of Norway

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Informations

Location

Eingang
Nord-West
ICM
Eingang
Nord
Eingang
West
Atrium
Eingang
Nord-Ost
Eingang
Ost
Conference
Center Nord
Freigelände
C1
C2
C3
C4
C5
C6
B0
B1
B2
B3
B4
B5
B6
A1
A2
A3
A4
A5
A6

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