The event database contains all event-related information for the World of Photonics Congress.
Lecture Hall A1 CLEO®/Europe-EQEC > Optical Sensing and Microscopy > Integrated sensors I
19:15-19:30 h | Hall A1 Room 1 "Albert Einstein"
Subjects: Sensors, Test and MeasurementSpeaker: Marek Vlk (Department of Physics and Technology, UiT The Arctic University of Norway)
Chairman: Andrea Armani (, University of Southern California)
We demonstrate successful fabrication of air-suspended tantalum pentoxide rib waveguides for gas sensing. The fine, high-aspect-ratio membrane structures were realized via selective removal of Si substrate using XeF2 etching and Al2O3 passivation.
Department of Physics and Technology, UiT The Arctic University of NorwayShow Profile