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The event database contains all event-related information for the World of Photonics Congress.

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Metrology for and with Nanooptics

JUN
24
2019
24. JUN 2019

Invited Talk Hall ICM - Internationales Congress Center München CLEO®/Europe-EQEC > Light and Structure > Computational photonics for metrology application

12:15-12:45 h | ICM - Internationales Congress Center München ICM Room 2

Subjects: Lasers and Laser Sources

Speaker: Thomas Pertsch (Friedrich Schiller University)

Chairman: Bernd Bodermann (, Physikalisch-Technische Bundesanstalt)

Type: Invited Talk

Speech: English

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While quantitatively characterizing nanooptical elements requires dedicated metrology methods, nanooptics itself enables novel ultraprecise measurement methods. Reported advances in these techniques range from white light interferometry and nearfield optical microscopy to lensless XUV metrology.

Thomas Pertsch

Thomas Pertsch

Friedrich Schiller University

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Informations

Thomas Pertsch

Location

Eingang
Nord-West
ICM
Eingang
Nord
Eingang
West
Atrium
Eingang
Nord-Ost
Eingang
Ost
Conference
Center Nord
Freigelände
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C6
B0
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